Abstract
Micro and nano sensors lie at the core of critical innovations spanning from medical and environmental sciences to industrial applications and security systems. In recent years, significant advancements have been made in sensor design for temperature, radiation, and volatile organic compound (VOC) detection, driven by progress in micro- and nano-fabrication technologies and the use of newly engineered functional materials. Advanced micro- and nano-fabrication techniques enable the production of these sensors at micro- and nanoscale dimensions, facilitating their integration into sensor arrays while maintaining high sensing performance and allowing miniaturization. These developments have particularly enhanced the sensitivity and selectivity of integrated platforms for precise measurement of radiation levels, selective detection of VOCs in ambient air, and accurate monitoring of temperature variations. Previously, various micro- and nanoscale sensors have been proposed and studied for these three categories, each exhibiting distinct advantages and limitations in terms of detection sensitivity, power consumption, response time, and recovery time. This study provides a comprehensive review of recent progress in micro- and nano-fabrication technologies for temperature, radiation, and VOC sensors. The functional materials employed, advanced microfabrication methods, and their impact on sensor design are discussed. Furthermore, the working principles, structural configurations, and performance characteristics of these sensors are examined. Finally, potential application areas and future technological developments for each sensor type are outlined.