Abstract
Metadevices are artificial periodic micro/nanostructures used to manipulate the propagation of electromagnetic waves. By properly engineering the geometrical dimensions and material compositions of metadevices subwavelength periodic unit cells, the permittivity and permeability of metadevices can be manually controlled. Thus, metadevices are widely studied in energy harvesting, medical imaging, cloaking devices, negative refraction index, and so on. The operating wavelength range of metadevices can be spanned in the entire electromagnetic spectrum by physically scaling the geometry from visible (Vis), infrared (IR), terahertz (THz), microwave (MW) specrea. There have been many metadevices demonstrated to have powerful performances. However, these rigid devices cannot be actively tuned once fabricated. The controllable metadevices help to improve flexibility by using an external stimulus. To satisfy this requirement, there are many techniques proposed for tuning mechanisms, including thermal annealing, laser pumping, phase-transition materials, two-dimensional (2D) material, liquid crystals, and nano-/micro-electro-mechanical systems (N/MEMS) technology. Among these, N/MEMS technology is a promising technique for actively tunable metadevices. These tunable metadevices exhibit assuredly unprecedented capabilities in the manipulation of incident electromagnetic wave, e.g., frequency, amplitude, phase, and polarization. They allow for the implementations of many traditional optical devices. Moreover, N/MEMS tuning methods can provide an ideal platform for metadevices, which is not limited by the nonlinear characteristic of natural materials and exhibits a large tuning range of resonant frequency. Recently, the actively tunable N/MEMS metadevices developed by Dr. Lin’s research group provide the possibility to manually manipulate electromagnetic waves from Vis light to THz wave. Here, the fruitful results in Dr. Lin’s research group for the actively tunable N/MEMS metadevices and their potential applications will be presented and summarized.