{"id":5176,"date":"2026-02-16T05:57:04","date_gmt":"2026-02-16T05:57:04","guid":{"rendered":"https:\/\/cognitionconferences.com\/robotics\/?post_type=speaker&#038;p=5176"},"modified":"2026-02-16T06:00:11","modified_gmt":"2026-02-16T06:00:11","slug":"arief-s-budiman","status":"publish","type":"speaker","link":"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/","title":{"rendered":"Arief S. Budiman"},"content":{"rendered":"<p><strong>Abstract<\/strong><\/p>\n<p>The importance of stress-induced warpage\/distortion in silicon semiconductor chips\/wafers cannot be understated \u2013 especially in light of the most recent trends in the semiconductor industry for 3D Hybrid Integration\/Packaging to enable the extreme high density integrated circuits for AI (Artificial Intelligence) and HPC (High Performance Computing) chips. Silicon is very brittle \u2013 microcracks and other damages (scratches, dents, pits, cleaves) can easily be found on surfaces of silicon semiconductor wafers and dies. Given residual stress in the wafers\/dies, they may grow and propagate into large scale damage and distortions which will lower production yield, make both die-to-wafer (D2W) and wafer-to-wafer (W2W) alignment very difficult in manufacturing and eventually affect performance of the chips during operations. Controlling the stress in silicon wafers\/dies is thus key. Die-level warpage and distortion control (especially in the context of Hybrid Bonding Integration\/HBI schemes in semiconductor advanced packaging) has direct impact on bonding quality and placement accuracy, and thus immediately affects production yield, yet there is no system commercially available now in the semiconductor industry that offers the capability to track them closely at the die-level, during the various manufacturing\/assembly processes, and at the needed spatial resolution accuracy. We present here in this paper a novel method of rapid stress-induced warpage\/distortion metrology for silicon semiconductor wafers\/dies at high resolution. It is non-X-ray Diffraction, but high resolution based on thin plate geometry and local surface curvature model according to Kirchhoff theory, combined with recent advances in laser interferometry instrumentation. In this paper, we demonstrate the first experimental findings on the technical feasibility of the novel technique on silicon thin plate samples and discuss paths for industrial implementation of the technique for use in semiconductor high volume manufacturing (HVM) as a metrology tool to enhance die placement accuracy and thus Cu-Cu bonding quality in the Die-to-Wafer Hybrid Bonding Integration (D2W HBI) Scheme crucial in realizing ultra-high density semiconductor packages and next generation assembly and systems packaging for AI and HPC chips.<\/p>\n","protected":false},"featured_media":5178,"template":"","meta":{"_acf_changed":false},"schedule":[],"speaker-category":[6],"class_list":["post-5176","speaker","type-speaker","status-publish","has-post-thumbnail","hentry","speaker-category-speakers"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v26.7 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Arief S. Budiman - Cognition Conferences<\/title>\n<meta name=\"description\" content=\"BiographyDr. Budiman earned his Ph.D. in Materials Science and Engineering from Stanford University in 2008 under the guidance of Professor William D. Nix (Von Hippel Award, Materials Research Society 2007) \u2013 arguably, the father of the famed \u201csmaller is stronger\u201d discovery. During his doctoral candidacy, Dr. Budiman received several research awards and contributed to several high-impact journal publications. He gave two symposium-invited talks in MRS (Materials Research Society) Spring and then Fall meetings of 2006 as a graduate student. He was then the recipient of the prestigious Los Alamos National Laboratory (LANL) Director\u2019s Research Fellow Award in 2009 to conduct top strategic research for the energy and national security missions of the Los Alamos National Laboratory\u2019s as a postdoctoral research fellow. Dr. Budiman is at the forefront of mechanics research where the classical worlds of mechanics intersect with the new realms of nanomaterials (nanolayers, nanopillars, etc.) or additively manufactured materials opening up exciting possibilities and startling novel technologies in the next generations of engineering systems and devices (energy, electronics and solar photovoltaics). Utilizing the one-of-a-kind, powerful high spatial resolution white-beam capabilities of the synchrotron-based submicron X-ray diffraction to elucidate unique behaviors of nanoscale and advanced materials, Dr. Budiman is one of the world\u2019s leading experts in mechanics and reliability of advanced\/nanoscale materials and cutting-edge semiconductor\/energy device\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Arief S. Budiman - Cognition Conferences\" \/>\n<meta property=\"og:description\" content=\"BiographyDr. Budiman earned his Ph.D. in Materials Science and Engineering from Stanford University in 2008 under the guidance of Professor William D. Nix (Von Hippel Award, Materials Research Society 2007) \u2013 arguably, the father of the famed \u201csmaller is stronger\u201d discovery. During his doctoral candidacy, Dr. Budiman received several research awards and contributed to several high-impact journal publications. He gave two symposium-invited talks in MRS (Materials Research Society) Spring and then Fall meetings of 2006 as a graduate student. He was then the recipient of the prestigious Los Alamos National Laboratory (LANL) Director\u2019s Research Fellow Award in 2009 to conduct top strategic research for the energy and national security missions of the Los Alamos National Laboratory\u2019s as a postdoctoral research fellow. Dr. Budiman is at the forefront of mechanics research where the classical worlds of mechanics intersect with the new realms of nanomaterials (nanolayers, nanopillars, etc.) or additively manufactured materials opening up exciting possibilities and startling novel technologies in the next generations of engineering systems and devices (energy, electronics and solar photovoltaics). Utilizing the one-of-a-kind, powerful high spatial resolution white-beam capabilities of the synchrotron-based submicron X-ray diffraction to elucidate unique behaviors of nanoscale and advanced materials, Dr. Budiman is one of the world\u2019s leading experts in mechanics and reliability of advanced\/nanoscale materials and cutting-edge semiconductor\/energy device\" \/>\n<meta property=\"og:url\" content=\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/\" \/>\n<meta property=\"og:site_name\" content=\"Cognition Conferences\" \/>\n<meta property=\"article:modified_time\" content=\"2026-02-16T06:00:11+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/cognitionconferences.com\/robotics\/wp-content\/uploads\/2026\/02\/Tatiana-11.png\" \/>\n\t<meta property=\"og:image:width\" content=\"500\" \/>\n\t<meta property=\"og:image:height\" content=\"600\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/png\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/\",\"url\":\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/\",\"name\":\"Arief S. 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Utilizing the one-of-a-kind, powerful high spatial resolution white-beam capabilities of the synchrotron-based submicron X-ray diffraction to elucidate unique behaviors of nanoscale and advanced materials, Dr. Budiman is one of the world\u2019s leading experts in mechanics and reliability of advanced\/nanoscale materials and cutting-edge semiconductor\/energy device\",\"breadcrumb\":{\"@id\":\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/#primaryimage\",\"url\":\"https:\/\/cognitionconferences.com\/robotics\/wp-content\/uploads\/2026\/02\/Tatiana-11.png\",\"contentUrl\":\"https:\/\/cognitionconferences.com\/robotics\/wp-content\/uploads\/2026\/02\/Tatiana-11.png\",\"width\":500,\"height\":600},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/cognitionconferences.com\/robotics\/speaker\/arief-s-budiman\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/cognitionconferences.com\/robotics\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Arief S. 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During his doctoral candidacy, Dr. Budiman received several research awards and contributed to several high-impact journal publications. He gave two symposium-invited talks in MRS (Materials Research Society) Spring and then Fall meetings of 2006 as a graduate student. He was then the recipient of the prestigious Los Alamos National Laboratory (LANL) Director\u2019s Research Fellow Award in 2009 to conduct top strategic research for the energy and national security missions of the Los Alamos National Laboratory\u2019s as a postdoctoral research fellow. Dr. Budiman is at the forefront of mechanics research where the classical worlds of mechanics intersect with the new realms of nanomaterials (nanolayers, nanopillars, etc.) or additively manufactured materials opening up exciting possibilities and startling novel technologies in the next generations of engineering systems and devices (energy, electronics and solar photovoltaics). 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Nix (Von Hippel Award, Materials Research Society 2007) \u2013 arguably, the father of the famed \u201csmaller is stronger\u201d discovery. During his doctoral candidacy, Dr. Budiman received several research awards and contributed to several high-impact journal publications. He gave two symposium-invited talks in MRS (Materials Research Society) Spring and then Fall meetings of 2006 as a graduate student. He was then the recipient of the prestigious Los Alamos National Laboratory (LANL) Director\u2019s Research Fellow Award in 2009 to conduct top strategic research for the energy and national security missions of the Los Alamos National Laboratory\u2019s as a postdoctoral research fellow. 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